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12-16-2014

ProtoLaser LDI

For Production of Microfluidic Devices

LPKF Laser & Electronics AG, Garbsen, Germany, in cooperation with the Slovenian company Aresis and the University of Ljubljana, is developing new low-cost, fast processes for structuring of microcomponents. With the LPKF ProtoLaser LDI for high-precision resist structuring resists for microcomponents can be produced cheaply and quickly.

The LPKF ProtoLaser LDI exposes resists with structures down to the micron range (figure: LPKF)

The LPKF ProtoLaser LDI exposes resists with structures down to the micron range (figure: LPKF)

Maskless UV laser direct imaging (LDI) of photosensitive polymers (photoresists) offers numerous advantages over classic mask projection techniques. Research and development in the field of microfluidic devices and micro-mechanical systems benefit from fast prototyping processes such as LPKF-LDI. Lab-on-a-chip devices help miniaturize processes and reduce liquid sample sizes as well as waste. This opens up tremendous possibilities for the LDI process in medicine, biology, chemistry, and physics.

The LPKF ProtoLaser LDI can be used for production of microfluidic de-vices as well as MEMS, BioMEMS, integrated optics, and photonic experiments with microscale structures. In terms of precision, LDI surpasses all comparable systems for mask projection. Investment costs are considerably lower than for electron beam lithography and for numerous mask alignment systems. LDI even enables structuring of elements with web widths of less than a micron.

Various cylinders machined out of SU-8. Maximum precision at an extremely high aspect ratio (figure: LPKF)

Various cylinders machined out of SU-8. Maximum precision at an extremely high aspect ratio (figure: LPKF)

Other features include: substrate exposure with a fo-cused 375-nm TEM00 UV laser beam, which can also be used for stand-ard UV resists; software-controllable laser focus (1 – 3 µm) for changing precision requirements; and an integrated camera for fine positioning of substrate and automated self-calibration as well as stitching mechanisms for real-time manufacturing of large samples.

Company profile

LPKF Laser & Electronics AG

Osteriede 9a
DE 30827 Garbsen
Tel.: 05131 7095-0
Fax: 05131 7095-90

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